Mega 960

Max Flow

95 LPM (25 GPM)

Max Temperature

212 °F (100 °C)

Max Pressure

80 PSIG (0.55 MPa)


PTFE/PFA fluid path
All wetted seals are PTFE
Air-side seals are Viton® (FKM)




LED/Flat Panel
Chemical Processing


This is the go-to standard for high flow chemical applications where non-stop performance is essential.

  • reliable operation in various applications because of patented non-stall air logic design
  • safe, pneumatic operation with clean, dry air or nitrogen
  • high suction capability due to patented floating PTFE O-ring check valve
  • non-penetrated, double layer PTFE diaphragm
  • immediate response to system backpressures (D-style control only)
  • user serviceable
  • clean room assembled, tested, and packaged
Control Styles

  • 960E for user defined
  • 960D for distribution and deadhead capability
Fluid Port Connections

  • ¾" Flare Tube Adapter
  • 1" Flare Tube Adapter
  • ¾" PFA Tube Stubout
  • 1" PFA Pipe
  • ¾" NPT
  • 1" NPT
  • No Adapter
Surge Suppressor

  • SS85
  • SS95
Other Options

  • Viton® or FFKM Air-Side Seals
  • Cycle Probe (960D only)
  • Remote Exhaust
  • Leak Probe